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Semiconductor Wafer Edge Exposer (WEE) Lamps

BLC International is your best source for high quality WEE lamps from Japan.

To remove photo-resist that is unnecessary for the developing process, “Wafer Edge Exposure” (WEE) systems irradiate UV on the edges of a photo-resist coated wafer. These systems utilize “short arc mercury lamps” that are optically aligned through the use of precision bases, to deliver the optimum dose of UV radiation. The use of Wafer Edge Exposure (WEE) lamps to create the Edge Bead Removal (EBR) on selected wafer layers provide a more consistent and sharper EBR ring. This results in more complete dies at the wafer edge.

The tolerance requirements for exact repeatability from lamp to lamp is critical to this application. Our goal is to provide our customers with the best technical lighting products in the industry. All of our WEE lamps are manufactured in Japan at our state of the art, ISO certified factory where each lamp’s alignment and output are checked and measured prior to leaving to insure the highest quality.

Semiconductor WEE Lamp Specifications

Part Number Cross Reference Type Watt Flange Ozone Cathode Equipment Mfg Lamp House Type Model
BLC-D200A0 L6190, L2570-4DS Hg-Xe 200 Yes Free B DNS WEE 80B (i-line)
BLC-D200A1 L6831 Hg-Xe 200 Yes Free B DNS WEE Track 200 (i-line)
BLC-D200A2 L8831, L8331, L8251 Hg-Xe 200 Yes Free B DNS HPK WEE SK-2000 (i-line), SK-3000 (i-line), RF Cube (i-line), ADB (i-line)
BLC-D200A3 201HS-D2 Hg-Xe 200 Yes Free S TEL Hoya WEE Mark-7, Mark-8, Mark-5Z
BLC-D200A4 201HS-2 Hg-Xe 200 Yes Free S Hoya Hoya Spot Cure UL200
BLC-D200A5 Hg-Xe 200 Yes Free S Panasonic Spot Cure ANUPS204
BLC-D200A6 200MX Hg-Xe 200 Yes Free S Hoya Hoya Spot Cure EXE3000, EXE4000
BLC-D200AB UXM-S200KL Hg-Xe 200 No Free S KLA Inspection 2131, 2132
BLC-D200B0 L2423-02 Hg-Xe 200 Yes Yes B DNS WEE 80B (DUV)
BLC-D200B1 L6832 Hg-Xe 200 Yes Yes B DNS WEE Track 200 (DUV)
BLC-D200B2 L8832, L8332, L8252 Hg-Xe 200 Yes Yes B DNS HPK WEE SK-2000 (KRF), SK-3000 (KRF), RF Cube (KRF), ADB (DUV)
BLC-D200BA UXM-200YA Hg-Xe 200 No Free B Yamashita Spot Cure Spot Cure
BLC-D250A0 UXM-256BY Hg-Xe 250 Yes Yes S Ushio Ushio Spot Cure SP-5, SP-6, SP7, SP9
BLC-D250A1 250AF Hg 250 Yes Free T Hoya Spot Cure UL250
BLC-D250B1 250AF-D Hg 250 Yes Yes T Hoya Spot Cure UL250
BLC-G250A0 250HS Hg 250 Yes Yes T TEL Hoya WEE ACT-12 and ACT-8
BLC-G250AC USH-250BY Hg 250 No Yes T TEL Ushio WEE Mark-7
BLC-G250C0 USH-255BY Hg 250 Yes Yes T Ushio Ushio Spot Cure SP-3
BLC-G250D0 Hg 250 Yes Yes T Panasonic Spot Cure ANUPS252, ANUPS255
BLC-G800AA SH-1002MA, SH1002NA Hg 800 No Yes T Toshiba Spot Cure Toscure 751